The primary process variables studied were amplitude of vibration, temperature, liquid flow rate, and permeate pressure. Data were obtained with two types of silicone rubber membranes—a thick (254 μm) fiberglass reinforced silicone rubber coated fiberglass fabric and a more typical pervaporation membrane consisting of a 10 μm silicone layer on a microporous support. The full-scale vibrating system delivered mass transfer coefficients comparable to those observed at the laboratory-scale and, under certain conditions, were comparable to those obtained with spiral wound pervaporation modules.